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Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel
Microelectronic Engineering ( IF 2.3 ) Pub Date : 2020-07-01 , DOI: 10.1016/j.mee.2020.111395
Davide Scaiola , Stefano Stassi , Roberta Calmo , Damien Maillard , Stefano S.G. Varricchio , Annalisa De Pastina , Guillermo Villanueva , Philippe Renaud , Carlo Ricciardi

Abstract Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for SNRs based on a sacrificial layer approach that allows to easily tailor the dimensions of the nanochannel by changing the thickness of the sacrificial layer or its patterning during the lithographic step. The resonance properties of the fabricated SNR are investigated in terms of resonance frequency and frequency stability (Allan deviation). Liquids of different densities are injected in the device and, from the shift of the resonance peaks, the mass responsivity of the resonators is assessed to be up to 3.90 mHz/ag. To the best of our knowledge, the devices here presented are the first example of suspended nanochannel resonators with a channel height as low as 50 nm fabricated with a top-down approach.

中文翻译:

具有嵌入式流体纳米通道的夹钳梁谐振器的制造

摘要 悬浮纳米通道谐振器 (SNR) 是一种很有前途的设备,能够将质量表征到阿克级,从而能够检测纳米颗粒或生物分子。在本文中,我们提出了一种基于牺牲层方法的 SNR 灵活制造工艺,该工艺允许通过在光刻步骤中改变牺牲层的厚度或其图案化来轻松定制纳米通道的尺寸。在谐振频率和频率稳定性(艾伦偏差)方面研究了制造的 SNR 的谐振特性。将不同密度的液体注入设备中,根据共振峰的移动,共振器的质量响应率被评估为高达 3.90 mHz/ag。据我们所知,
更新日期:2020-07-01
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