The positioning accuracy of machine-tool tables used for translatory movement and coordinate measuring machine carriages requires improvement. Transmission and blocking of light can be realized by combining a transmissive liquid crystal and a polarizing plate. In this study, this technique was applied to a laser interferometer to realize selective multi-degree-of-freedom motion measurement using one measurement system. A ball lens was adopted as a reflecting mirror, and the rotational-movement amount was measured using a photodetector. In addition, rotational movement with two degrees of freedom was selectively measured using one interferometer, through transmission and blocking of light. It was found that the pitch and yaw rotational movement can be selectively measured using the difference between displacements of the axial directions of two ball lenses for the movement of the goniometer stage with 0.0032° resolution and the rotational stage with 0.004° resolution, respectivel...

中文翻译：

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干涉仪，用于使用液晶显示屏和四个球形透镜进行俯仰和偏航测量

用于平移运动和坐标测量机座的机床工作台的定位精度需要提高。通过将透射型液晶和偏振片组合，可以实现光的透射和阻挡。在这项研究中，该技术被应用于激光干涉仪，以使用一个测量系统实现选择性的多自由度运动测量。采用球形透镜作为反射镜，并使用光电探测器测量旋转运动量。另外，使用一个干涉仪通过光的透射和阻挡选择性地测量了具有两个自由度的旋转运动。