Abstract This technical note documents the fabrication and performance of multiplexed electrospray emitters by rapid laser micromachining. A low cost 1064-nm fiber laser marker system is used to precisely, rapidly and selectively remove materials from a sheet of conductive silicone rubber, which is chemically inert. The laser pulse energy, scanning speed and machining path are judicially chosen to create clean and round micro posts that form external nozzle structures. This laser micromachining technique offers sufficient precision for ensuring uniform pressure drop across each fluid flow channel even at relatively low flow rate per nozzle. The uniformity of the operation from nozzle to nozzle is confirmed by measuring the diameter of each cone-jet. The results suggest that the laser micromachining is a rapid and convenient technique for fabricating multiplexed electrospray emitters.

中文翻译：

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通过快速激光微加工制造的多路电喷雾发射器

摘要 本技术说明记录了通过快速激光微加工制造的多路电喷雾发射器的制造和性能。低成本的 1064 纳米光纤激光刻印机系统用于从化学惰性的导电硅橡胶片上精确、快速和选择性地去除材料。激光脉冲能量、扫描速度和加工路径经过司法选择，以创建形成外部喷嘴结构的清洁圆形微柱。这种激光微加工技术提供了足够的精度，即使在每个喷嘴的流速相对较低的情况下，也能确保每个流体流动通道上的压降均匀。通过测量每个锥形射流的直径来确认从喷嘴到喷嘴的操作的均匀性。