Integration of nanoscale photonic and plasmonic components on Si substrates is a critical step toward Si‐based integrated nanophotonic devices. In this work, a set of unique complex 3D metamaterials with intercalated nanolayered and nanopillar structures with tunable plasmonic and optical properties on Si substrates is designed. More specifically, the 3D metamaterials combine metal (Au) nanopillars and alternating metal‐nitride (Au‐TiN and Au‐TaN) nanolayers, epitaxially grown on Si substrates. The ultrafine Au nanopillars (d ≈ 3 nm) continuously grow throughout all the nanolayers with high epitaxial quality. Novel optical properties, such as highly anisotropic optical property, high absorbance covering the entire visible spectrum regime, and hyperbolic property in the visible regime, are demonstrated. Furthermore, a waveguide based on a silicon nitride (Si₃N₄) ridge with a multilayer structure is successfully fabricated. The demonstration of 3D nanoscale metamaterial design integrated on Si opens up a new route toward tunable metamaterials nanostructure designs with versatile material selection for various optical components in Si integrated photonics.

中文翻译：

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在纳米Si上嵌入氮化物多层中嵌入金纳米柱的3D混合等离子框架

将纳米级光子和等离激元组件集成到Si基片上是朝着基于Si的集成纳米光子器件迈出的关键一步。在这项工作中，设计了一组独特的复杂3D超材料，这些材料在Si衬底上具有可插拔的等离子和光学特性，并具有可插拔的纳米层和纳米柱结构。更具体地说，3D超材料将金属（Au）纳米柱和交替的金属氮化物（Au-TiN和Au-TaN）纳米层结合在一起，外延生长在Si衬底上。超细金纳米柱（d≈3 nm）以高外延质量在所有纳米层中连续生长。证明了新颖的光学特性，例如高度各向异性的光学特性，覆盖整个可见光谱范围的高吸收率以及可见范围内的双曲线特性。此外，成功地制造了具有多层结构的基于氮化硅（Si ₃ N ₄）脊的波导。集成在Si上的3D纳米级超材料设计的演示开辟了一条通往可调谐超材料纳米结构设计的新途径，该设计为Si集成光子学中的各种光学组件提供了多种材料选择。