A Metal-Insulator-Metal (MIM) waveguide structures consists of cross-shaped cavity and baffle was proposed. The simulation results show that the tunable Fano resonance existed in cross-shaped cavity structures by adjusting the length parameters of horizontal and vertical cavities. Further, the position and alignment of the resonant peak wavelength can be easily changed. The sensitivity of the structure is up to 1075 nm/RIU and the figure of merit (FOM) is 9.95 × 10⁴ by changing the parameters of structure. However, for improved double cross-shaped cavity structure, a linear refractive index sensitivity of 1100 nm/RIU with a figure of merit of about 1.08 × 10⁵ can be obtained. The results clarified that the developed structure could have a great potential in nanosensor and spectral splitter.

提出了一种由十字形腔和挡板组成的金属-绝缘体-金属（MIM）波导结构。仿真结果表明，通过调节水平和垂直空腔的长度参数，可调谐Fano共振存在于十字形空腔结构中。此外，可以容易地改变共振峰波长的位置和取向。通过更改结构参数，结构的灵敏度高达1075 nm / RIU，品质因数（FOM）为9.95×10 ⁴。但是，对于改进的双十字形腔结构，线性折射率灵敏度为1100 nm / RIU，品质因数约为1.08×10 ⁵可以获得。结果表明，所开发的结构在纳米传感器和光谱分离器中具有很大的潜力。