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Design of a Novel 3D Ultrasonic Vibration Platform with Tunable Characteristics
International Journal of Mechanical Sciences ( IF 7.3 ) Pub Date : 2020-11-01 , DOI: 10.1016/j.ijmecsci.2020.105895
Kangkang Lu , Yanling Tian , Chunfeng Liu , Chongkai Zhou , Zhiyong Guo , Fujun Wang , Dawei Zhang , Bijan Shirinzadeh

Abstract Vibration-assisted tip-based nanofabrication techniques have advantages including increased material removal rate, reduced tip wear, and better material adaptability over traditional tip-based mechanical plowing. However, the influences of different vibration parameters on the machining efficiency are unclear, and how to select appropriate cutting parameters to guarantee the machined surface quality need further investigations. This paper introduces the design, modeling, and experimental validation of a novel 3D ultrasonic vibration platform with tunable characteristics. Moreover, multiple vibration modes including 1D (linear) and 2D (in-plane or out-of-plane) vibrations can be achieved. A novel flexure hinge, named T-shaped spatial flexure hinge is used to realize both in-plane and out-of-plane motions with a compact structure. Static modeling and dynamic modeling are conducted to guide the design process, and finite element analysis is utilized to verify the established model. Afterwards, a prototype is fabricated, and a number of experiments are implemented to validate the characteristics of the developed vibration platform. The experimental results show that different vibration modes can be achieved, and both the vibration amplitude and frequency can be set to an arbitrary value within a wide range according to the fabrication requirement. The maximum amplitude and frequency can reach around 50 nm and 20 kHz, i.e. ultrasonic frequency, respectively.

中文翻译:

具有可调特性的新型3D超声振动平台的设计

摘要 与传统的基于尖端的机械犁相比,基于振动辅助的尖端纳米加工技术具有提高材料去除率、减少尖端磨损和更好的材料适应性等优点。然而,不同振动参数对加工效率的影响尚不清楚,如何选择合适的切削参数来保证加工表面质量有待进一步研究。本文介绍了具有可调特性的新型 3D 超声振动平台的设计、建模和实验验证。此外,可以实现多种振动模式,包括一维(线性)和二维(面内或面外)振动。一种新型的挠性铰链,称为T形空间挠性铰链,用于以紧凑的结构实现平面内和平面外运动。通过静态建模和动态建模来指导设计过程,并利用有限元分析来验证所建立的模型。之后,制造了原型,并进行了大量实验以验证开发的振动平台的特性。实验结果表明,可以实现不同的振动模式,并且振动幅度和频率都可以根据制造要求在很宽的范围内设置为任意值。最大振幅和频率可以分别达到50 nm和20 kHz左右,即超声波频率。并进行了大量实验以验证所开发的振动平台的特性。实验结果表明,可以实现不同的振动模式,并且振动幅度和频率都可以根据制造要求在很宽的范围内设置为任意值。最大振幅和频率可以分别达到50 nm和20 kHz左右,即超声波频率。并进行了大量实验以验证所开发的振动平台的特性。实验结果表明,可以实现不同的振动模式,并且振动幅度和频率都可以根据制造要求在很宽的范围内设置为任意值。最大振幅和频率可以分别达到50 nm和20 kHz左右,即超声波频率。
更新日期:2020-11-01
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