In this work, we designed a novel structure to produce vibration sensors with a linear voltage output that are suitable for large-amplitude vibration applications. Specifically, the sensor structure featured a cylindrical proof mass attached to a diaphragm structure with eight release holes. Based on this structure and using a commercial eight-inch microelectromechanical system foundry process, aluminum nitride based piezoelectric vibration sensors were successfully fabricated. The produced piezoelectric gauge film and the mechanical properties and electrical performance of the fabricated vibration sensors were comprehensively evaluated. The results demonstrated that the fabricated vibration sensors presented center resonance values within the frequency range of 5–6 kHz and an acceleration responsivity of up to 460 mV/g. The measured nonlinearity of the sensors was less than 1% in the testing range of 10–50 g at 150 Hz. The mass fabrication of our high-performance large-amplitude vibration sensors is expected to support the realization of many advanced domestic and industrial applications, e.g., for the rational and economical monitoring of the safety of industrial and civil structures over time.

在这项工作中，我们设计了一种新颖的结构来生产具有线性电压输出的振动传感器，适用于大振幅振动应用。具体而言，该传感器结构的特征是将圆柱形检测质量附着到带有八个释放孔的膜片结构上。基于此结构，并使用商业化的八英寸微机电系统铸造工艺，成功地制造了基于氮化铝的压电振动传感器。全面评估了所生产的压电规膜以及所制造的振动传感器的机械性能和电性能。结果表明，所制造的振动传感器在5-6 kHz的频率范围内具有中心共振值，并且加速度响应率高达460 mV / g。在150 Hz的10–50  g测试范围内，传感器的测量非线性度小于1％。我们的高性能大振幅振动传感器的批量制造有望支持许多先进的家庭和工业应用的实现，例如，随着时间的推移，对工业和民用建筑安全性进行合理和经济的监控。