Atomic force microscopy (AFM) often relies on the assumption that cantilever bending can be described by simple beam theory and that the displacement of the tip can be evaluated from the cantilever angle. Some more advanced metrological instruments use free-space or fibre interferometers for measuring the position of the cantilever apex directly, thereby simplifying the metrology traceability chain. The next logical development, covering measurements of both the cantilever apex position and its deformation due to lateral forces acting during different AFM measurement regimes, is presented in this paper. It is based on using a set of closely packed fibre interferometers that can be used to determine localised bending of the cantilever at different positions along the cantilever. This can be used for detection of cantilever deformation beyond classical beam theory, and can yield both better understanding of sources of uncertainty in individual AFM force–distance measurements and m...

中文翻译：

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用于原子力显微镜中探针样品相互作用测量的多纤维干涉仪设置

原子力显微镜（AFM）通常依赖以下假设：可以通过简单的射束理论描述悬臂弯曲，并且可以从悬臂角度评估尖端的位移。一些更先进的计量仪器使用自由空间或光纤干涉仪直接测量悬臂顶点的位置，从而简化了计量可追溯性链。本文介绍了下一个逻辑发展，涵盖了悬臂顶点位置及其在不同的AFM测量方式下作用于侧向力的变形的测量。它基于使用一组紧密堆积的光纤干涉仪，该干涉仪可用于确定沿悬臂的不同位置处的悬臂的局部弯曲。