This study demonstrates the first athermal polysilicon Mach-Zehnder interferometer (MZI) based on strip and subwavelength grating waveguides in commercialized bulk CMOS without any process modification. As-fabricated MZI exhibits a temperature sensitivity of ±4 pm/°C over 1500~1600 nm wavelength range with a slope of −0.055 pm/°C/nm. This wavelength filtering device is therefore immune from the temperature gradient issue arising from the nearby electronic circuits, thus is promising for practical on-chip optical interconnect and sensor applications in bulk CMOS.

中文翻译：

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体 CMOS 中的无热多晶硅 Mach-Zehnder 干涉仪

这项研究展示了第一个无热多晶硅 Mach-Zehnder 干涉仪 (MZI)，它基于商业化体 CMOS 中的条带和亚波长光栅波导，无需任何工艺修改。制造的 MZI 在 1500~1600 nm 波长范围内表现出 ±4 pm/°C 的温度灵敏度，斜率为 -0.055 pm/°C/nm。因此，该波长滤波器件不受附近电子电路引起的温度梯度问题的影响，因此有望用于体 CMOS 中的实际片上光学互连和传感器应用。