Opportunities for quantitative, real‐time monitoring of gases, ions, and biomolecules in the environment and in the human body motivate programs of fundamental and applied research on chemically selective sensors with fast response times. In this context, silicon field‐effect transistors are of considerable interest as label‐free, scalable platforms for detecting a variety of chemical and biological species. Herein, recent progress and research directions in this area are reviewed. The focus of this article is on operational parameters, device architectures, schemes for surface chemical functionalization, and methods for bio‐integration across a variety of use cases. The content includes strategies that combine Si with other functional materials to create hybrid structures for enhanced sensing performance. The final section highlights some remaining challenges and provides perspectives on the future of basic research and engineering development in this field.

中文翻译：

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Si杂化纳米结构的化学和生物传感界面工程

对环境和人体中的气体，离子和生物分子进行定量，实时监测的机会激发了对具有快速响应时间的化学选择性传感器进行基础和应用研究的计划。在这种情况下，硅场效应晶体管作为无标签，可扩展的平台可用于检测多种化学和生物种类，因此引起了广泛的关注。在此，综述了该领域的最新进展和研究方向。本文的重点是在各种使用案例中的操作参数，设备架构，表面化学功能化方案以及生物集成方法。内容包括将Si与其他功能材料结合以创建混合结构以增强感测性能的策略。