Abstract Optical nano multilayers (NMs) are promising candidates for durable transparent multifunctional coatings, where the contributions of interfaces and high transparency configurations have yet to be explored. To address this, high transparency NMs (%T380-1100nm≈94–99%) were synthesized by magnetron sputtering, and the effects of crystalline/amorphous (AlN/SiO2, AlN/Al2O3) and amorphous/amorphous (TiO2/SiO2) interfaces were characterized by spectrophotometry, transmission electron microscopy, and nanoindentation. We demonstrate that tuning layer configurations for improved transmittance resulted in substantial variations in microstructure and multifunctional film properties. Overall, this work presents a methodology for evaluating the structure-properties relationship in optical NMs in the context of interface character and layer microstructure.

中文翻译：

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光学透明陶瓷晶体/非晶和非晶/非晶多层膜的合成和表征

摘要 光学纳米多层膜 (NMs) 是耐用透明多功能涂层的有前途的候选材料，其中界面和高透明度配置的贡献尚待探索。为了解决这个问题，通过磁控溅射合成了高透明纳米材料（%T380-1100nm≈94-99%），以及结晶/非晶（AlN/SiO2、AlN/Al2O3）和非晶/非晶（TiO2/SiO2）界面的影响用分光光度法、透射电子显微镜和纳米压痕法表征。我们证明了用于提高透射率的调谐层配置导致微观结构和多功能薄膜特性的显着变化。全面的，