This work reports on the fabrication of microbump structures on nickel (Ni) films by single-pulse, localized laser irradiation. Conditions for the reproducible formation of such microstructures have been identified in terms of laser-irradiation and film parameters after systematic studies involving a relevant parameter space. Ni films deposited by vacuum evaporation were found to be better suited for reproducible laser microstructuring because they lack the typical cracks and voids morphology of sputtered films. The continuous and smooth nature of the evaporated films facilitated a radially symmetric heat flow propagation upon laser irradiation, which then resulted in a complex combination of thermal expansion, deformation, and other processes leading to a high yield of microstructures. An improvement in the inductance and the quality factor of on-chip spiral inductors, incorporating such laser-microstructured ferromagnetic nickel thin films was observed, which demonstrates the potential of such a laser-based method for fabrication or fine tuning of various micro-/nano-electric/electronic sensor and other components and systems.

中文翻译：

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基于激光的镍薄膜微结构制备及其在片上薄膜电感器中的应用

这项工作报告了通过单脉冲局部激光照射在镍 (Ni) 膜上制造微凸点结构。在涉及相关参数空间的系统研究之后，已经根据激光辐照和薄膜参数确定了可重复形成这种微结构的条件。发现通过真空蒸发沉积的 Ni 薄膜更适合可重复的激光显微结构，因为它们没有溅射薄膜的典型裂纹和空隙形态。蒸发薄膜的连续和平滑特性促进了激光照射时径向对称的热流传播，然后导致热膨胀、变形和其他过程的复杂组合，从而导致微结构的高产量。