An amorphous equiatomic FeCrMnNiC alloy thin film was synthesised on silica and silicon substrates by ion beam sputter deposition. Scanning electron microscopy energy-dispersive X-ray spectroscopy, X-ray diffraction, selected area electron diffraction and nano indentation were used to investigate the material. The produced film is amorphous and uniform on the atomic level without any detectable element segregation. The corrosion properties were assessed in 3.5% NaCl solution. The FeCrMnNiC alloy has corrosion resistance better than corrosion resistance of 304 SS. The thin film has hardness at around 12.3 ± 0.5 GPa and reduced Young’s modulus at around 222 ± 12 GPa.

通过离子束溅射沉积法在二氧化硅和硅衬底上合成了非晶态等原子FeCrMnNiC合金薄膜。用扫描电子显微镜能量色散X射线能谱，X射线衍射，选择区域电子衍射和纳米压痕对材料进行了研究。产生的膜是无定形的，在原子水平上是均匀的，没有任何可检测的元素偏析。在3.5％NaCl溶液中评估腐蚀性能。FeCrMnNiC合金的耐腐蚀性优于304 SS的耐腐蚀性。薄膜的硬度约为12.3±0.5 GPa，杨氏模量降低了，约为222±12 GPa。