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Spark plasma sintering of W-10Ti high-purity sputtering target: Densification mechanism and microstructure evolution
International Journal of Refractory Metals & Hard Materials ( IF 3.6 ) Pub Date : 2020-06-15 , DOI: 10.1016/j.ijrmhm.2020.105313
Lei Huang , Jiuxing Zhang , Yafei Pan , Yong Du

The densification mechanism and microstructure evolution of W-10Ti sputtering target prepared by spark plasma sintering (SPS) method at a temperature ranges from 900 to 1600 °C, with dwelling time of 6 min and fixed pressure of 30 MPa were investigated. Densification occurs mainly at low temperatures (900 to 1300 °C), while grain growth occurs at high temperatures (1400 to 1600 °C). The creep model has been used to reveal the densification process. The effective stress exponent n is calculated systematically, which indicates that the densification process is mainly due to the particle rearrangement (n < 1), grain boundary diffusion (n = 1–2), and dislocation climbing (n = 3.77 or 4.14). In addition, the apparent activation energy Qd is calculated to be 119.30 and 271.79 kJ/mol when the effective stress exponent n is equal to 1 and 2, respectively. It is also found that the microstructure of W-10Ti alloys is greatly affected by the sintering temperatures. The solution between W and Ti significantly improves with the increase of the sintering temperature. The solubility of W in βTi(W) exceeded the eutectoid point (28.97 wt% W) and the eutectoid structure (βW(Ti) + αTi) forms in cooling process when the temperature is up to 1300 °C. With the temperature increasing to 1500 °C, the composition of the βTi(W) phase is located in the miscibility gap of the (βTi(W), βW(Ti)) system, which tends to decompose in to βTi(W) and βW(Ti) phases.



中文翻译:

W-10Ti高纯溅射靶的火花等离子体烧结:致密化机理和组织演变

研究了通过火花等离子体烧结(SPS)法在900〜1600℃的温度下,停留时间为6min,固定压力为30MPa的条件下制备的W-10Ti溅射靶的致密化机理和组织演变。致密化主要发生在低温(900至1300°C)下,而晶粒长大则发生在高温(1400至1600°C)下。蠕变模型已用于揭示致密化过程。系统计算出有效应力指数n,这表明致密化过程主要是由于粒子重排(n  <1),晶界扩散(n  = 1-2)和位错爬升(n  = 3.77或4.14)引起的。另外,表观活化能当有效应力指数n等于1和2时,Q d计算得出为119.30和271.79 kJ / mol 。还发现,W-10Ti合金的显微组织受烧结温度的影响很大。W和Ti之间的溶液随着烧结温度的升高而显着提高。W在βTi(W)中的溶解度超过共析点(28.97 wt%W),当温度高达1300°C时,在冷却过程中会形成共析结构(βW(Ti)+αTi)。随着温度升高至1500°C,βTi(W)相的组成位于(βTi(W),βW(Ti))体系的可混溶间隙中,并易于分解为βTi(W)和。 βW(Ti)相。

更新日期:2020-06-15
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