Abstract A novel cantilever array-based biosensor was batch-fabricated with IC compatible MEMS technology for precise liver cancer biomarker detection. A microcavity was designed in the free end of the cantilever for local antibody-immobilization using the micro-printing system, which can dramatically reduce the effect of adsorption-induced stiffness coefficient k variation. These structural features offer several advantages: high sensitivity, high throughput, high mass detection accuracy, and high specification. In addition, the surface biofunctionalization methods were commonly used in biological detection devices are mainly introduced, and the optimal biofunctionalization scheme for silicon-based microcantilever is proposed. The modification procedure of APTES-GA was characterized by cantilever, and the uniform aldehyde surface of the microcantilever was obtained. The immobilization time and culture method of the microcantilever antibodies were optimized to obtain localized, dense and highly active antibody surfaces. Which provides an excellent surface functionalization method for the cantilever biosensor.

中文翻译：

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基于悬臂生物传感器的硅表面生物功能化过程表征方法

摘要 采用IC兼容的MEMS技术批量制造了一种新型悬臂阵列生物传感器，用于精确检测肝癌生物标志物。在悬臂的自由端设计了一个微腔，用于使用微打印系统进行局部抗体固定，可以显着降低吸附引起的刚度系数 k 变化的影响。这些结构特点提供了几个优点：高灵敏度、高通量、高质量检测精度和高规格。此外，主要介绍了生物检测装置中常用的表面生物功能化方法，提出了硅基微悬臂梁的最佳生物功能化方案。APTES-GA 的改性过程以悬臂为特征，并获得了微悬臂梁的均匀醛表面。优化了微悬臂梁抗体的固定时间和培养方法，以获得局部、致密和高活性的抗体表面。这为悬臂生物传感器提供了一种极好的表面功能化方法。