Large-sized gantry-type linear motor sliders are widely used in industry (e.g. in liquid crystal panel production equipment). An appropriate control model is important for deriving control methods to improve control performance. Although various control models of large-sized gantry-type linear motor sliders have been developed in previous studies, no results are yet reported regarding control models which precisely reproduce characteristics of a large-sized gantry-type linear motor slider. In general, a method to derive a transfer function by using frequency responses can be employed to obtain an accurate control model, however, large sized gantry-type linear motor sliders have unique characteristics, namely “distortion” and “coupling”, thus the transfer function derived using only the frequency response cannot reproduce the experimental results with high accuracy. In this paper we report on a method to obtain a highly precise control model of a large sized gantry-type linear motor slider.

中文翻译：

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大型龙门式直线电机滑块的高精度控制模型

大型龙门式线性电动机滑块在工业中被广泛使用（例如，在液晶面板生产设备中）。适当的控制模型对于推导控制方法以提高控制性能很重要。尽管在先前的研究中已经开发出大型龙门型线性电动机滑块的各种控制模型，但是尚未报道关于精确地再现大型龙门型线性电动机滑块的特性的控制模型的结果。通常，可以采用通过使用频率响应来导出传递函数的方法来获得精确的控制模型，但是，大型龙门型线性电动机滑块具有独特的特性，即“失真”和“耦合”，因此，仅使用频率响应导出的传递函数无法高精度地再现实验结果。在本文中，我们报告了一种用于获得大型龙门式线性电机滑块的高精度控制模型的方法。