This paper presents an accurate and complete analysis of the dynamic performance of a V-shaped microactuator. This multi-physical coupling analysis is split into two steps: the electro-thermal sub-model for temperature distribution and the thermo-elastic sub-model for displacement. For the electro-thermal sub-model, a combination of the Chebyshev spectral method and the improved Euler method is utilized to predict the thermal dynamic behavior, where a piecewise partial differential equation exists. This method is found to have conditional stability which is dependent on time steps and number of points. Although a one-dimensional geometric model is used in it, the obtained temperature profile hardly shows a difference over time compared with that from the finite element method where a three-dimensional geometric model is established. The method’s calculation time is also sharply reduced. According to the forced vibration theory, the thermo-elastic sub-model is rebuilt regardless ...

中文翻译：

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V型电热微执行器的动态行为分析

本文对V型微执行器的动态性能进行了准确而完整的分析。这种多物理场耦合分析分为两个步骤：用于温度分布的电热子模型和用于位移的热弹性子模型。对于电热子模型，利用切比雪夫谱方法和改进的欧拉方法的组合来预测热动力行为，其中存在分段偏微分方程。发现该方法具有条件稳定性，该条件稳定性取决于时间步长和点数。尽管使用了一维几何模型，但是与建立三维几何模型的有限元方法相比，所获得的温度曲线几乎不会随时间变化。该方法的计算时间也大大减少。根据强制振动理论，无论如何，都将重建热弹性子模型。