The paper reports on the fabrication and characterisation of E3135 epoxy polymer planar waveguides fabricated onto allyl diglycol carbonate substrate. We measured transmission spectra from the visible to near-infrared region and studied waveguiding properties by the m-line spectroscopy using six lasers (532.0, 654.2, 846.4, 1308.2, 1549.1 and 1652.1 nm). Optical scattering losses of the planar waveguides were measured by the fibre scanning method. The lowest values of the optical losses were 0.33 dB/cm at 632.8 nm and 0.35 dB/cm at 850 nm. Our research showed that the epoxy polymer E3135 is a promising material for the implementation into the MOEMS structures with higher integration density, thus it allows for realisation low-cost and feasibly elaborated MOEMS components.

该论文报道了在烯丙基碳酸二乙二醇酯基底上制备的E3135环氧聚合物平面波导的制备和表征。我们测量了从可见光到近红外区域的透射光谱，并使用六种激光（532.0、654.2、846.4、1308.2、1549.1和1652.1 nm）通过m线光谱学研究了波导特性。平面波导的光散射损耗是通过光纤扫描法测量的。最低的光损耗值为632.8 nm处的0.33 dB / cm和850 nm处的0.35 dB / cm。我们的研究表明，环氧聚合物E3135是具有较高集成密度的有前景的材料，可用于MOEMS结构中，因此可实现低成本且易于制造的MOEMS组件。