This paper reports an imprint and transfer approach for the rapid and inexpensive fabrication of the ultra-thin freestanding plasmonic membrane (FPM) that supports surface plasmon resonances. The imprint and transfer fabrication method involves the soft imprint lithography on an ultrathin polymer film, transfer of the perforated polymer film to a supporting frame, subsequent deposition of gold, and final removal of the polymer film. Without using any sophisticated lithography and etching processes, the imprint and transfer method can produce freestanding gold membranes with 2D arrays of submicrometer-sized holes that support plasmonic modes in the mid-wavelength infrared (mid-IR) range. Two FPM devices with an array constant of 4.0 and 2.5 μm have been simulated, fabricated, and measured for their transmittance characteristics. The fabricated FPMs exhibit surface plasmon polariton Bloch mode and extraordinary optical transmission (EOT) with the enhanced local field around the membrane. The effects of membrane thickness and angle dispersion on the FPM were investigated to show the tuning of EOT modes in IR. Furthermore, we demonstrated the refractometric sensing and enhanced IR absorption of the FPM device for its potential in chemical and biomolecule sensing applications.

中文翻译：

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独立等离子体膜的压印和转移制造

本文报告了一种快速且廉价地制造支持表面等离子体共振的超薄独立等离子体膜 (FPM) 的压印和转移方法。压印和转移制造方法包括在超薄聚合物膜上进行软压印光刻，将穿孔聚合物膜转移到支撑框架上，随后沉积金，最后去除聚合物膜。在不使用任何复杂的光刻和蚀刻工艺的情况下，压印和转移方法可以生产具有亚微米尺寸孔的二维阵列的独立金膜，这些孔支持中波长红外 (mid-IR) 范围内的等离子体模式。已经模拟、制造和测量了两个阵列常数为 4.0 和 2.5 μm 的 FPM 器件的透射特性。制造的 FPM 表现出表面等离子体极化子布洛赫模式和非凡的光传输 (EOT)，膜周围的局部场增强。研究了膜厚度和角色散对 FPM 的影响，以显示 EOT 模式在 IR 中的调整。此外，我们展示了 FPM 设备在化学和生物分子传感应用中的潜力的折射传感和增强的红外吸收。