Flexible sensors with high sensitivity and stability have been tremendously attractive in recent years. In this study, flexible capacitive sensors (FCSs) with microstructured-surface were fabricated, where electrode layers (e-layers) and dielectric layers (d-layers) of the FCSs were sprayed with carbon fiber (CF) filled-polydimethylsiloxane (PDMS) and pure PDMS on substrate with surface roughness, respectively. Sensitivity of the fabricated FCSs to compressive load was evaluated. Influence of the surface microstructure of d- and e-layers on the sensitivity was studied through in-situ microscopic observations and theoretical capacitance calculations. Results showed that the roughness of the surface microstructure did have a correlation with the sensitivity. Excellent sensing performance, including a high sensitivity (∼0.82 kPa⁻¹), ultrafast response (∼0.2 s) and relaxation (∼0.3 s) time, ultralow detection limit (∼1.2 Pa), and excellent stability (10⁴ loading/unloading cycles) over a wide pressure range (0−50 kPa) appeared on the FCS with its surface microstructure size of 48.6 μm in roughness. The high sensitivity of the fabricated FCS was dominantly resulted from the closing of air gap between e- and d-layers. A 3 × 3 FCS array capable of distinguishing space pressure distribution and a mouse glove capable of inputting computer information were finally fabricated which demonstrated a prospect of the FCS in micro-load response and human-machine interaction applications.

近年来，具有高灵敏度和稳定性的柔性传感器已经引起了极大的吸引力。在这项研究中，制造了具有微结构化表面的柔性电容传感器（FCS），其中，用碳纤维（CF）填充的聚二甲基硅氧烷（PDMS）喷涂了FCS的电极层（e层）和介电层（d层）。和纯PDMS分别在具有表面粗糙度的基材上。评估了制造的FCS对压缩载荷的敏感性。d表面微观结构的影响通过原位显微镜观察和理论电容计算研究了-和e层的灵敏度。结果表明，表面微观结构的粗糙度确实与灵敏度相关。出色的感测性能，包括高灵敏度（〜0.82 kPa ^-1），超快响应（〜0.2 s）和松弛（〜0.3 s）时间，超低检测极限（〜1.2 Pa）以及出色的稳定性（10 ^4个装卸）在宽压力范围（0-50 kPa）上出现了FCS，其表面微观结构尺寸为48.6μm。制成的FCS的高灵敏度主要是由于缩小了e-和d之间的气隙层。最终制造出了能够区分空间压力分布的3×3 FCS阵列和能够输入计算机信息的鼠标手套，这证明了FCS在微负载响应和人机交互应用中的前景。