Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based on the giant piezoresistivity of SiBCN ceramics. The SiBCN ceramic sensor was packaged in a stainless steel case and tested using half Wheatstone bridge with the uniaxial pressure up to 10 MPa. The SiBCN ceramic showed a remarkable piezoresistive effect with the gauge factor (K) as high as 5500. The output voltage of packed SiBCN ceramic sensor changes monotonically and smoothly versus external pressure. The as received SiBCN pressure sensor possesses features of short response time, excellent repeatability, stability, sensitivity, and accuracy. Taking the excellent high temperature thermo-mechanical properties of polymer-derived SiBCN ceramics (e.g., high temperature stability, oxidation/corrosion resistance) into account, SiBCN ceramic sensor has significant potential for pressure measurement at high temperature and harsh environments.

中文翻译：

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源自聚合物的SiBCN陶瓷压力传感器，具有出色的传感性能

尤其在高温和恶劣环境下，非常需要具有出色稳定性和长期耐用性的压力测量。基于SiBCN陶瓷的巨大压阻，设计了具有出色的稳定性，准确性和可重复性的聚合物衍生的碳氮化硅硼化硅（SiBCN）陶瓷压力传感器。SiBCN陶瓷传感器包装在不锈钢外壳中，并使用单轴压力高达10 MPa的半惠斯通电桥进行测试。SiBCN陶瓷在标称因数（K）高达5500。封装的SiBCN陶瓷传感器的输出电压相对于外部压力单调平稳地变化。收到的SiBCN压力传感器具有响应时间短，可重复性，稳定性，灵敏度和准确性高的特点。考虑到聚合物衍生的SiBCN陶瓷优异的高温热机械性能（例如，高温稳定性，抗氧化/耐腐蚀），SiBCN陶瓷传感器在高温和恶劣环境下的压力测量具有巨大潜力。