Abstract In this paper, the effects of hollow nanospheres diameter on gas sensing characteristics are studied by simulation and experimental method. Two-dimensional sensor model and hollow spheres material model are established to study the distribution of gas concentration, temperature and current density. Simulation results show that the diameter of nanospheres have a significant influence on the current density distribution, and both too large diameter and too small diameter will reduce sensor response. SnO2 hollow spheres with different diameters are fabricated for experimental verification. The experimental results agree with the simulation results. The size of the hollow spheres changes, the response of sensor, the optimal operating temperature, and the selectivity also change. Compared with 100 nm and 2000 nm, 500 nm hollow nanospheres sensor has higher selectivity and response value. The response is 43 for 100 ppm ethanol when the sensor operates at the optimum operating temperature.

中文翻译：

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基于SnO2空心球的微尺度分析和气敏特性

摘要 本文通过模拟和实验的方法研究了纳米空心球直径对气敏特性的影响。建立二维传感器模型和空心球材料模型，研究气体浓度、温度和电流密度的分布。仿真结果表明，纳米球的直径对电流密度分布有显着影响，直径过大和过小都会降低传感器响应。制造不同直径的 SnO2 空心球用于实验验证。实验结果与模拟结果一致。空心球的大小发生变化，传感器的响应、最佳工作温度和选择性也会发生变化。与 100 nm 和 2000 nm 相比，500 nm空心纳米球传感器具有更高的选择性和响应值。当传感器在最佳工作温度下工作时，100 ppm 乙醇的响应为 43。