Abstract

The thermodynamic properties of ruthenium complex compound Ru(thd)₃, (thd is tris(2,2,6,6-tetramethyl-3,5-heptadionate), Ru(C₁₁H₁₉O₂)₃ have been studied. Temperatures (434.8 ± 2.0, 452.2 ± 1.0, and 461.1 ± 1.0, and 487.8 ± 1 K) and thermodynamic parameters (enthalpy change ΔH = 13.3 ± 2.0, 2.1 ± 0.5, 6.0 ± 2.0, and 3.8 ± 1 kJ mol^–1) of three reversible solid-phase transitions and the melting process have been determined by differential scanning calorimetry. The temperature dependence of the saturated vapor pressure in the range 392–488 K has been established by the flow method. The thermodynamic parameters of sublimation (enthalpy change ΔH = 121 ± 1, 103 ± 3, 101 ± 5, and 86 ± 2 kJ mol^–1; entropy change ΔS° = 219 ± 3, 176 ± 7, 173 ± 10, 141 ± 4 J mol^–1 K^–1) for all four crystalline phases have been calculated. CVD diagrams have been calculated by thermodynamic modeling to determine the equilibrium phase composition of the system. The obtained results allow us to give recommendations on finding the optimal conditions for the CVD process and choosing the precursor.

中文翻译：

---

β-二酮基钌络合物Ru（thd）3作为前驱体用于CVD制备涂层的热力学表征

摘要

研究了钌络合物Ru（thd）₃（thd为三（2,2,6,6-四甲基-3,5-庚二酸酯），Ru（C ₁₁ H ₁₉ O ₂）₃的热力学性质。 （434.8±2.0、452.2±1.0和461.1±1.0和487.8±1 K）和热力学参数（焓变ΔH = 13.3± 2.0、2.1±0.5、6.0± 2.0和3.8±1 kJ mol ^–1）通过差示扫描量热法确定了三个可逆固相转变和熔融过程，并通过流动方法确定了在392–488 K范围内饱和蒸气压的温度依赖性。升华（焓变）的热力学参数Δ ^ h= 121±1、103±3、101±5和86±2 kJ mol ^–1；已计算出所有四个结晶相的熵变ΔS °= 219±3、176±7、173±10、141±4 J mol ^–1 K ^–1。CVD图已通过热力学建模计算出来，以确定系统的平衡相组成。获得的结果使我们能够为寻找CVD工艺的最佳条件并选择前驱物提供建议。