An integrated multilaser process is developed to fabricate nanocrystalline nanonetwork SnO₂ gas sensors in one integrated procedure, which combines electrodes fabrication, nanomaterials deposition, and postannealing. Interdigit electrodes are fabricated on an Au‐coated fused silica substrate using a picosecond (ps) laser, which ablates the Au coating from the back of the substrate to pattern the electrodes. A novel transmitted Ps laser deposition (TPLD) process is designed to deposit SnO₂ nanonetwork on the interdigit electrodes with precise deposition area control under a close target‐to‐substrate distance. The obtained SnO₂ nanonetwork is in situ postannealed by a CO₂ laser to improve the crystallinity, while the nano morphology and grain size keep intact. To investigate the morphology and formation process of the nanonetwork, the microstructure of the laser‐deposited SnO₂ layer is characterized. The crystallization control of CO₂ laser annealing is investigated through analyzing the Raman spectrum, X‐ray diffraction (XRD) patterns, and lattice structures of the samples. By exposed to H₂ atmosphere, the fabricated gas sensor is demonstrated for H₂ monitoring.

中文翻译：

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集成多激光器处理一步法制备纳米晶纳米网络SnO2气体传感器

开发了一种集成的多激光工艺，以一种集成的工艺制造纳米晶体纳米网络SnO ₂气体传感器，该工艺将电极制造，纳米材料沉积和后退火相结合。指间电极是使用皮秒（ps）激光在镀金的熔融石英基板上制造的，该激光从基板背面烧蚀镀金层，从而形成电极图案。设计了一种新颖的透射Ps激光沉积（TPLD）工艺，可以在指间距离近的情况下，通过精确的沉积面积控制在指间电极上沉积SnO ₂纳米网络。将获得的SnO ₂纳米网络通过CO ₂原位后退火激光可提高结晶度，而纳米形态和晶粒尺寸保持完整。为了研究纳米网络的形态和形成过程，表征了激光沉积的SnO ₂层的微观结构。通过分析样品的拉曼光谱，X射线衍射（XRD）图案和晶格结构，研究了CO ₂激光退火的结晶控制。通过暴露于H ₂气氛，证明了所制造的气体传感器可用于H ₂监测。