A novel stick-slip rotary piezoelectric actuator is designed for optical use. The actuator is proposed, fabricated, and tested with the aim of realizing both fine resolution and a long stroke. The dynamic model of the actuator is established, and simulations are performed to discover how the input driving voltage affects the stick-slip motion of the actuator. An experimental system is built to evaluate the performance of the actuator at different frequencies, voltages, and numbers of driving piezoelectric stacks. Experimental results show that the minimal output stepping angle is 3.5 μrad (0.2 millidegrees) under a sawtooth waveform having a voltage of 13 V and frequency of 3000 Hz and that the velocity reaches 0.44 rad/s (25°/s) under a sawtooth waveform having a voltage of 93 V and frequency of 3000 Hz, while the stroke is infinite. The proposed actuator provides stable and accurate rotary motion and realizes a high velocity.

中文翻译：

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新型的粘滑型旋转压电致动器

一种新颖的粘滑旋转压电致动器设计用于光学用途。提出，制造和测试执行器的目的是实现高分辨率和长行程。建立执行器的动态模型，并进行仿真以发现输入驱动电压如何影响执行器的粘滑运动。建立了一个实验系统来评估执行器在不同频率，电压和驱动压电堆栈数量下的性能。实验结果表明，最小输出步进角为3.5  μ电压为13 V且频率为3000 Hz的锯齿波形下rad（0.2毫度），并且在电压为93 V且频率为3000 Hz的锯齿波形下速度达到0.44 rad / s（25°/ s） ，而笔触是无限的。所提出的致动器提供稳定且精确的旋转运动并实现高速度。