Silicon photonics has attracted tremendous interest from academia and industry, as the fabrication of the silicon family of photonic devices is mostly compatible with the microelectronics process using complementary metal‐oxide semiconductors (CMOS). Herein, three silicon‐family materials are discussed: silicon, silicon nitride, and silica. In addition, hybrid integration with a 2D material, graphene, is examined. First, the material and waveguide properties are reviewed. Second, typical fabrication processes for waveguide devices are introduced. Subsequently, a variety of passive waveguide devices, operating at different physical dimensions covering wavelength, polarization, and mode, are discussed. They correspond to fixed and tunable filters, polarization beam splitters and rotators, and mode conversion and multiplexing devices. These passive waveguide devices play important roles in a wide range of applications including telecom, interconnects, computing, sensing, quantum information processing, bio‐photonics, and energy.

中文翻译：

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用于无源波导设备的硅光子平台：材料，制造和应用

硅光子学引起了学术界和工业界的极大兴趣，因为光子器件硅系列的制造与使用互补金属氧化物半导体（CMOS）的微电子工艺基本兼容。本文讨论了三种硅族材料：硅，氮化硅和二氧化硅。此外，还研究了与2D材料石墨烯的混合集成。首先，回顾材料和波导特性。其次，介绍了波导器件的典型制造工艺。随后，讨论了在覆盖波长，偏振和模式的不同物理尺寸下运行的各种无源波导器件。它们对应于固定和可调滤波器，偏振分束器和旋转器以及模式转换和多路复用设备。