The paper analyzes the microstructure and phase state of magnetron-sputtered nanocomposite Ti-C-Ni-Cr coatings based on Ni- and Cr-doped amorphous carbon by transmission electron microscopy, scanning electron microscopy, and X-ray diffraction. The analysis shows that the coating structure comprises an amorphous carbon matrix and nanosized TiC and Ni particles with relatively low lattice bending-torsion (no greater than 75° µm−1) and with much lower local internal stress compared to its value in superhard coatings. The microhardness of such coatings on VT1-0 titanium alloy is H = 14 GPa, and their friction coefficient is µ < 0.2. The coating structure and properties are stable to annealing up to T = 700°C. After annealing at T = 900°C, the coating surface reveals TiO, Ti2O, and other oxide phases. The results of scratch testing show that the character and the scale of fracture in the coatings depend on the substrate hardness: on soft substrates, the coatings experiences intense cracking and delamination, and on hard alloy substrates, they undergo multifragmented fracture. The coatings on hard alloy substrates survive up to a load of 80 N.

中文翻译：

---

基于无定形碳的纳米复合涂层的结构相态、弹性应力和功能特性

本文通过透射电子显微镜、扫描电子显微镜和 X 射线衍射分析了基于 Ni 和 Cr 掺杂非晶碳的磁控溅射纳米复合 Ti-C-Ni-Cr 涂层的微观结构和相状态。分析表明，涂层结构包含无定形碳基体和纳米尺寸的 TiC 和 Ni 颗粒，与超硬涂层中的值相比，具有相对较低的晶格弯曲扭转（不大于 75° µm-1）和低得多的局部内应力。这种涂层在VT1-0钛合金上的显微硬度为H = 14 GPa，摩擦系数为μ < 0.2。涂层结构和性能在高达 T = 700°C 的退火条件下是稳定的。在 T = 900°C 下退火后，涂层表面显示出 TiO、Ti2O 和其他氧化物相。划痕测试结果表明，涂​​层的性质和断裂程度取决于基体硬度：在软基体上，涂层发生剧烈的开裂和分层，在硬质合金基体上，它们发生多片断裂。硬质合金基材上的涂层可承受高达 80 N 的载荷。