Abstract

(In₂O₃)_0.95(SnO₂)_0.05, (TbO_х)_0.50(Y₂O₃)_0.50, and (CeO₂)_0.80(Y₂O₃)_0.20 single-phase cubic solid solution xerogels and nanocrystalline powders have been synthesized via coprecipitation of hydroxides. Using these powders as precursors, nanoscale film electroconductive materials on a corundum substrate have been produced by screen printing. The highest speed of sensor response to ozone is attributed to In_0.95Sn_0.05O_1.5 films, reaching 8–10 s at a temperature of 473 K. (TbO_х)_0.50(Y₂O₃)_0.50 thin film is found to be sensitive to changes in the concentrations of (CO + CO₂) (the sensitivity coefficient S = 25.11) and ozone (S = 3.16–7.94). (CeO₂)_0.80(Y₂O₃)_0.20 film exhibits a sensor response to (CO + CO₂) (S = 3.10). This study opens up the prospects of using the obtained nanopowders and relevant thin films as materials for resistive gas sensors operating at oxygen pressures of 10³–10⁴ Pa.

中文翻译：

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In 2 O 3 –SnO 2和Y 2 O 3 –TbO x（CeO x）系统中纳米薄膜的合成及传感器特性

摘要

（在₂ ö ₃）_0.95（SNO ₂）_0.05，（TBO _х）_0.50（Y ₂ ö ₃）_0.50，和（的CeO ₂）_0.80（Y ₂ ö ₃）_0.20单相立方固溶体干凝胶和纳米粉末具有通过氢氧化物的共沉淀合成。使用这些粉末作为前体，已经通过丝网印刷在刚玉基底上制备了纳米级薄膜导电材料。传感器对臭氧的最高响应速度归因于In _0.95 Sn _0.050 _1.5薄膜，在473 K.（TBO的温度达到8-10小号_х）_0.50（Y ₂ ö ₃）_0.50薄膜被发现是在（CO + CO的浓度变化敏感₂）（灵敏度系数S = 25.11）和臭氧（S = 3.16–7.94）。（CeO ₂）_0.80（Y ₂ O ₃）_0.20膜对（CO + CO ₂）（S= 3.10）。这项研究开辟了使用获得的纳米粉和相关薄膜作为在10 ³ –10 ⁴ Pa的氧气压力下工作的电阻式气体传感器材料的前景。