Abstract

The molecular-dynamics simulation of impacts of accelerated argon cluster ions with titanium surface is carried out. The dependences of the dimensions of the produced defects and of the number of sputtered titanium atoms on the cluster-ion dimensions, energies, and incidence angles are studied.

中文翻译：

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氩团簇离子与钛表面相互作用的分子动力学模拟

摘要

进行了钛表面加速氩团簇离子撞击的分子动力学模拟。研究了产生的缺陷的尺寸和溅射钛原子的数量对簇离子尺寸，能量和入射角的依赖性。