Abstract

A new method of gas-phase diamond deposition with a high-velocity jet used to transport gases activated in microwave plasma to a substrate is developed. Diamond was synthesized from a mixture of hydrogen with the addition of 1% methane. The deposition rate (78 μm/h) was more than an order of magnitude higher than that achieved earlier in experiments with activation of similar initial mixtures in microwave plasma.

中文翻译：

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高速微波等离子体流合成金刚石

摘要

开发了一种利用高速射流气相金刚石沉积的新方法，该方法用于将微波等离子体中活化的气体传输到基板上。金刚石是由氢气与1％甲烷的混合物合成的。沉积速率（78μm/ h）比在微波等离子体中激活类似初始混合物的实验中的沉积速率高出一个数量级。