The deposition parameters involved in chemical bath deposition were optimized by a response surface methodology to synthesize upright ZnO rod arrays with large diameters. The effects of the factors on the preferential orientation, aspect ratio, and diameter were determined systematically and efficiently. The results demonstrated that an increased concentration, elevated reaction temperature, prolonged reaction time, and reduced molar ratio of Zn²⁺ to tri-sodium citrate could increase the diameter and promote the preferential oriented growth along the [002] direction. With the optimized parameters, the ZnO rods were grown almost perfectly vertically with the texture coefficient of 99.62. In the meanwhile, the largest diameter could reach 1.77 μm. The obtained rods were merged together on this condition, and a dense ZnO thin film was formed.

中文翻译：

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响应面法优化合成大直径直立式ZnO棒阵列

通过响应表面方法优化了化学浴沉积中涉及的沉积参数，以合成大直径的直立ZnO棒阵列。系统地，有效地确定了这些因素对优先方向，长宽比和直径的影响。结果表明，Zn ^2+的浓度增加，反应温度升高，反应时间延长和摩尔比降低。柠檬酸三钠可增加直径并促进沿[002]方向的择优取向生长。通过优化的参数，ZnO棒几乎垂直生长，织构系数为99.62。同时，最大直径可以达到1.77μm。在此条件下将获得的棒融合在一起，并形成致密的ZnO薄膜。