Abstract In this work, we explored the sensitivity of surface plasmon resonance biosensor on using silicon and hybrid nanostructure of black phosphorus and MXene (Ti3C2Tx) at 633 nm. To investigate the prominence of each layer, we categorized it into Kretschmann configuration based different simple structures. The performance of each sensor structure is theoretically analyzed after systematically optimizing their layer thicknesses and layer numbers. Highest sensitivity (264 0/RIU) and optimum figure of merit (41.25/RIU) is achieved for the proposed SPR structure. Results shows, pronounced sensitivity enhancement of 127.58% for proposed sensor over conventional SPR. Enhanced sensitivity is attained due to attractive optical sensing properties of silicon (high refractive index), black phosphorus (high charge carrier mobility, carrier confinement) and MXene-Ti3C2Tx (high metallic conductivity, biocompatibility, larger hydrophilic surface area). The proposed design can be fabricated as SPR chip by careful control of Ti3C2Tx surface terminations with available fabrication technologies.

中文翻译：

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硅对使用黑磷和MXene混合纳米结构的SPR生物传感器灵敏度的影响

摘要 在这项工作中，我们探索了表面等离子体共振生物传感器对使用硅和黑磷和 MXene (Ti3C2Tx) 混合纳米结构在 633 nm 处的灵敏度。为了研究每一层的突出性，我们将其分类为基于不同简单结构的 Kretschmann 配置。在系统地优化层厚和层数后，对每个传感器结构的性能进行了理论上的分析。建议的 SPR 结构实现了最高灵敏度 (264 0/RIU) 和最佳品质因数 (41.25/RIU)。结果显示，与传统 SPR 相比，所提出的传感器的灵敏度显着提高了 127.58%。由于硅（高折射率）、黑磷（高电荷载流子迁移率、载体限制）和 MXene-Ti3C2Tx（高金属导电性、生物相容性、更大的亲水表面积）。通过使用可用的制造技术仔细控制 Ti3C2Tx 表面终端，可以将所提出的设计制造为 SPR 芯片。