This paper presents a technology computer-aided design analysis of an ultrasensitive black phosphorus junctionless recessed channel MOSFET as a biosensor. A nano cavity gap is embedded in the gate insulator region (for molecules immobilization) due to which gate capacitance changes owing to the accumulation of different molecules which reflects the deviation in threshold voltage. Higher sensitivity (1.7) is achieved for protein at low V_ds (0.2 V) in comparison to streptavidin (1.17) and Biotin (1.24). Further, the effect of cavity gap length and oxide thickness variation is also examined. All the results pave the way for early detection techniques of protein-related diseases such as Alzheimer’s diseases, ovarian cancer and coronary artery disease with the existing complementary metal–oxide–semiconductor technology.

本文介绍了一种作为生物传感器的超灵敏黑磷无结凹陷沟道MOSFET的技术计算机辅助设计分析。纳米腔隙被嵌入在栅极绝缘体区域中（用于分子固定），由于不同的分子的积累（反映阈值电压的偏差），栅极电容发生变化，从而使栅极电容发生变化。在低V _ds条件下获得更高的灵敏度（1.7）（0.2 V）与链霉亲和素（1.17）和生物素（1.24）相比。此外，还研究了空穴间隙长度和氧化物厚度变化的影响。所有结果为现有的互补金属-氧化物-半导体技术为蛋白质相关疾病的早期检测技术（如阿尔茨海默氏病，卵巢癌和冠状动脉疾病）铺平了道路。