Abstract In this work the induced voltage in an interdigital electrode when swept by a finite, triboelectrically charged dielectric surface is investigated. Finite element modelling fits well with the measured voltage as a function of position. An analytical model for the accuracy with which the position of the object can be determined, in presence of noise, is presented. The fundamental limit with which the position can be determined from electrical output data is also discussed, and could act as a useful guideline when estimating the limits of self-powered position sensor systems.

中文翻译：

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关于叉指式静电位置传感器的精度

摘要 在这项工作中，研究了当被有限的摩擦带电电介质表面扫过时叉指电极中的感应电压。有限元建模与作为位置函数的测量电压非常吻合。提出了在存在噪声的情况下可以确定物体位置的精度的分析模型。还讨论了可以根据电气输出数据确定位置的基本限制，并且在估计自供电位置传感器系统的限制时可以作为有用的指南。