Simultaneous measurement of the straightness error and its position using a modified Wollaston-prism-sensing homodyne interferometer is proposed. In this modified interferometer, we designed a special moving sensor combining a Wollaston prism and a semi-reflective mirror being able to not only avoid the straightness measurement deviation caused by the measured object’s rotation but also simultaneously obtain the straightness error’s position without adding any measuring beam. Further, phase-modulating homodyne interferometry with phase generation carrier (PGC) demodulation is adopted to reduce the nonlinear error of phase measurement. Benefiting from the modified interferometer, the straightness error and its position can be measured simultaneously, and the measurement accuracy and stability can be improved. The optical configuration and the measurement principle of this method are presented. The influence of rotation angles on the straightness measurement result is also discuss...

中文翻译：

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使用改良的Wollaston棱镜感测零差干涉仪同时测量直线度误差及其位置

提出了使用改进的沃拉斯顿棱镜传感零差干涉仪同时测量直线度误差及其位置的方法。在这种改进的干涉仪中，我们设计了一种结合了沃拉斯顿棱镜和半反射镜的特殊运动传感器，该传感器不仅可以避免由于被测物体旋转而导致的直线度测量偏差，而且还可以在不增加任何测量光束的情况下同时获得直线度误差的位置。此外，采用具有相位产生载波（PGC）解调的相位调制零差干涉测量法来减小相位测量的非线性误差。得益于改进的干涉仪，可以同时测量直线度误差及其位置，并可以提高测量精度和稳定性。介绍了该方法的光学结构和测量原理。还讨论了旋转角度对直线度测量结果的影响...