Surface patterning is widely performed in various applications, and hence high-resolution, high-throughput, and nondestructive measurement of patterned surfaces is required. The current optical methods used for such measurements are constrained, in terms of spatial resolution, by the diffraction limit. In this study, structured illumination was employed for high-resolution wide-field imaging measurements. Structured illumination microscopy is well known as a fluorescent bio-imaging technique. For nonfluorescent imaging and industrial measurement applications, however, speckle noise, generated by the structured illumination pattern, environmental vibrations, and thermal drift, causes problems for the high-precision positioning and control of the illumination pattern. To solve these problems, we developed a structured illumination microscope that detects the phase of the structured illumination as a fringe signal by using an additional interferometric measurement system. In this s...

中文翻译：

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具有结构化照明的高分辨率非荧光成像，可用于图案化表面测量

表面图案化在各种应用中被广泛执行，因此需要对图案化表面进行高分辨率，高通量和无损测量。就空间分辨率而言，用于这种测量的当前光学方法受到衍射极限的限制。在这项研究中，结构化照明被用于高分辨率的宽视场成像测量。结构照明显微镜是众所周知的荧光生物成像技术。但是，对于非荧光成像和工业测量应用，由结构化的照明图案，环境振动和热漂移产生的斑点噪声会导致照明图案的高精度定位和控制出现问题。为了解决这些问题，我们开发了一种结构化照明显微镜，该显微镜通过使用附加的干涉测量系统将结构化照明的相位检测为条纹信号。在这...