Bipolar high power impulse magnetron sputtering (HiPIMS) with a yttrium target is investigated with the help of time-resolved diagnostics. The bipolar HiPIMS discharge is operated with a negative pulse with a width of 100 μ s, which is immediately followed by a positive pulse (pulse voltage up to +60 V) with a duration of ∼ 310 μ s. The time-resolved floating potential first rises to a large positive voltage of ∼ 55 V at the beginning of the positive pulse (+60 V) and after 30 μ s drops to ∼ 38 V. It indicates the ignition of a reversed discharge. Further evidence of such a reversed discharge is confirmed by time-resolved mass spectrometry and time-resolved optical emission spectroscopy.

中文翻译：

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双极 HiPIMS 放电的时间分辨诊断

在时间分辨诊断的帮助下，研究了带有钇靶的双极高功率脉冲磁控管溅射 (HiPIMS)。双极 HiPIMS 放电采用宽度为 100 μs 的负脉冲进行操作，紧随其后的是持续时间约为 310 μs 的正脉冲（脉冲电压高达 +60 V）。时间分辨浮动电位在正脉冲开始时（+60 V）首先上升到 55 V 的大正电压，30 μs 后下降到 38 V。这表明反向放电的点火。时间分辨质谱和时间分辨光学发射光谱证实了这种反向放电的进一步证据。