Multi-wall vertically aligned carbon nanotubes (VACNTs) are nearly ideal absorbers due to their exceptionally low reflectance over a broad wavelength range. Integrating VACNTs as bolometer absorbers, however, can be difficult due to their high growth temperature and fragile nature. Despite these challenges, we have microfabricated many different types of VACNT bolometers, ranging from cryogenic optical power primary standards to room temperature satellite-based solar irradiance monitors and broadband infrared microbolometers. Advantages our VACNT bolometers provide over the bolometers they replace vary by application, but can be reduced size and time constant, increased absorption, and/or microfabrication instead of hand assembly. Depending on the application and operating conditions, our VACNT bolometers are designed with a variety of thermistors and weak thermal links. The thermistors used include commercial surface mount chips, superconducting transition-edge sensors, and vanadium oxide (VO_x). Weak thermal links include silicon nitride (SiN_x) membranes, Si bridges, and laser-cut polyimide. We summarize a wide variety of microfabricated bolometers with VACNT absorbers that measure optical power levels spanning over seven orders of magnitude.

中文翻译：

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具有垂直排列的碳纳米管吸收器的辐射热计概述

多壁垂直排列的碳纳米管（VACNT）几乎是理想的吸收剂，因为它们在很宽的波长范围内反射率极低。但是，由于VACNTs的生长温度高且易碎，因此很难集成为辐射热吸收器。尽管存在这些挑战，但我们已经微制造了许多不同类型的VACNT辐射热测量计，从低温光功率主要标准到室温的基于卫星的太阳辐照度监测仪和宽带红外测微辐射热计。我们的VACNT辐射热测量计提供的优势超过它们所替代的辐射热测量计，但因应用而异，但可以减小尺寸和时间常数，增加吸收率，并且/或者可以代替手工组装而进行微加工。根据应用和操作条件，我们的VACNT热辐射计设计有各种热敏电阻和弱热链路。使用的热敏电阻包括商用表面贴装芯片，超导过渡边缘传感器和氧化钒（VO_x）。弱热连接包括氮化硅（SiN _x）膜，硅桥和激光切割的聚酰亚胺。我们总结了各种带VACNT吸收器的微型辐射热计，它们可测量跨越七个数量级的光功率水平。