In the ultra-precision industry, physical and chemical coatings are used to provide functional properties to the surface. Especially, it is very important to examine the mechanical durability of polymer thin films with super hydrophobic properties. The mechanical durability of the thin film includes adhesion force and shear strength, and the latter can be measured with precise cutting. A sharp blade capable of changing cutting direction is used for cutting nano-thick films. Then, nano cutting method is used to calculate the shear strength by measuring the resistant forces when the blade cuts thin films simultaneously in the horizontal and vertical directions (slanted cutting). In this study, we prepared two super-hydrophobic fluoropolymers, p(PFDMA) (1H, 1H, 2H, 2H-perfluorodecyl methacrylate) thin film and p(V4D4-PFDMA-co-DVB) thin film, using initiated chemical vapor deposition method. Especially, p(V4D4-PFDMA-co-DVB) thin film was obtained by continuous deposition with V4D4 (1,3,5,7-tetravinyl-1,3,5,7-tetramethylcyclotetrasiloxane) and DVB (C₆H₄(CH=CH₂)₂, divinylbenzene) in order to improve its durability, and the abrasion test was performed to quantitatively check the durability. In order to qualitatively assess the durability, the thin film was cut with a customized precision-cutting tool, and the shear strength and adhesion force were analyzed. As a result, it was confirmed that the mechanical durability of p(V4D4-PFDMA-co-DVB) thin film has dramatically improved compared to p(PFDMA) thin film. In addition, the nano cutting theory was successfully verified to evaluate the mechanical properties of thin films.

在超精密工业中，物理和化学涂层用于为表面提供功能特性。特别地，检查具有超疏水性的​​聚合物薄膜的机械耐久性非常重要。薄膜的机械耐久性包括粘附力和剪切强度，后者可以通过精确切割来测量。能够改变切割方向的锋利刀片用于切割纳米级薄膜。然后，使用纳米切割方法通过测量刀片同时在水平和垂直方向切割薄膜时的阻力（倾斜切割）来计算剪切强度。在这项研究中，我们制备了两种超疏水含氟聚合物，即p（PFDMA）（1H，1H，2H，2H-甲基丙烯酸全氟癸酯）薄膜和p（V4D4-PFDMA-co-DVB）薄膜，使用引发的化学气相沉积方法。尤其是，通过连续沉积V4D4（1,3,5,7-四乙烯基-1,3,5,7-四甲基环四硅氧烷）和DVB（C）获得p（V4D4-PFDMA-co-DVB）薄膜为了提高其耐久性，使用₆ H ₄（CH ＝ CH ₂）₂（二乙烯基苯），进行了磨损试验，定量地确认了耐久性。为了定性评估耐久性，用定制的精密切割工具切割薄膜，并分析了剪切强度和粘附力。结果，证实了与p（PFDMA）薄膜相比，p（V4D4-PFDMA-co-DVB）薄膜的机械耐久性显着提高。此外，纳米切割理论已成功验证以评估薄膜的机械性能。