A SiN-Si dual-layer optical phased array (OPA) chip is designed and fabricated. It combines the low loss of SiN with the excellent modulation performance of Si, which improves the performance of Si single-layer OPA. A novel optical antenna and an improved phase modulation method are also proposed, and a two-dimensional scanning range of 96°×14° is achieved, which makes the OPA chip more practical.

中文翻译：

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SiN-Si双层光相控阵芯片的设计与制作

设计并制作了SiN-Si双层光学相控阵(OPA)芯片。它结合了SiN的低损耗和Si优异的调制性能，提高了Si单层OPA的性能。还提出了一种新颖的光学天线和改进的相位调制方法，实现了96°×14°的二维扫描范围，使OPA芯片更加实用。