Abstract Recent studies on piezoelectricity in 2D materials, such as graphene, have revealed their potential in multiple applications including microelectromechanical systems. In this work, we reveal piezoelectricity in few-layer graphene sheets deposited on amorphous Si3N4 membranes. The response in the center of square membrane of 6.7 × 6.7 mm2 size reaches about 14 nm at resonance and could be further enhanced by adjusting the composite structure. Resonance piezoelectric phenomena are fully consistent with the earlier piezoresponse force microscopy observations on free-standing piezoelectric graphene and open up a possibility of using 2D materials in micromechanical applications.

中文翻译：

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用于微机械应用的石墨烯基膜的干涉测量

摘要 最近对 2D 材料（如石墨烯）压电性的研究揭示了它们在包括微机电系统在内的多种应用中的潜力。在这项工作中，我们揭示了沉积在非晶 Si3N4 膜上的几层石墨烯片的压电性。6.7 × 6.7 mm2 方形膜中心的响应在共振时达到约 14 nm，可以通过调整复合结构进一步增强。共振压电现象与早期对独立压电石墨烯的压电响应力显微镜观察完全一致，并开辟了在微机械应用中使用二维材料的可能性。