The calibration of areal surface topography measuring instruments is a topic that is currently under discussion in international standard committees and a specification standard that defines the so-called 'metrological characteristics' has been published. For the broad industrial adoption of the metrological characteristics for calibration, however, clear and easy-to-apply calibration guidelines are required. Thus, a single-sample calibration artefact has been developed which allows the determination of the standardised metrological characteristics. In order to promote the adoption of the metrological characteristics calibration framework, measurements of the material measures with different instruments have been conducted and the results are presented. We report early work on the uncertainty of the comparison results and discuss systematic deviations between the various surface topography measuring instruments.

中文翻译：

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用于面积表面形貌测量仪器校准的材料措施比较

面积表面形貌测量仪器的校准是当前在国际标准委员会中讨论的主题，并且已定义了定义所谓的“计量特性”的规范标准。但是，为了在工业上广泛采用计量特性进行校准，需要明确且易于应用的校准准则。因此，已经开发出单样本校准伪像，其可以确定标准化的计量特性。为了促进计量特性校准框架的采用，已使用不同的仪器对材料进行了测量，并给出了结果。