The manufacture of inertial-grade and tactical-grade diamond micro electro mechanical systems (MEMS) hemispherical resonator gyroscopes is limited by the manufacturing accuracy of the monocrystalline silicon hemispherical concave mold, on which the gyroscope shell is formed. To solve this problem, this paper presents a new method for micro-ultrasonic machining of microhemispherical molds for resonator gyroscopes using an ultraprecise ceramic entire-ball tool (UCET). To study the wear mechanism of the UCET and the influence of tool wear on the surface integrity and form accuracy of the microhemispherical mold, a mathematical model for the tool wear of micro-ultrasonic machining of microhemispherical molds with UCET is established and verified by experiments. The micro-ultrasonic amplitude, the abrasive material and the abrasive size is found to have significant influences on the tool wear of the UCET. The wear rates of tungsten carbide and silicon nitride ceramic tools are 2.22% ...

中文翻译：

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使用新型超精密陶瓷全球工具的MEMS谐振陀螺仪的微超声加工半球形模具

惯性级和战术级金刚石微机电系统（MEMS）半球形谐振器陀螺仪的制造受制于其上形成陀螺仪外壳的单晶硅半球形凹模的制造精度的限制。为了解决这个问题，本文提出了一种使用超精密陶瓷全球工具（UCET）对谐振器陀螺仪的微半球形模具进行微超声加工的新方法。为了研究UCET的磨损机理以及刀具磨损对微球模具的表面完整性和形状精度的影响，建立了使用UCET的微球模具微超声加工刀具磨损的数学模型，并进行了实验验证。微超声振幅，发现磨料和磨料尺寸对UCET的工具磨损有重大影响。碳化钨和氮化硅陶瓷工具的磨损率为2.22％...