This paper presents an ultrasonically powered microsystem for deep tissue optogenetic stimulation. All the phases in developing the prototype starting from modelling the piezoelectric crystal used for energy harvesting, design, simulation and measurement of the chip, and finally testing the whole system in a mimicking setup are explained. The developed system is composed of a piezoelectric harvesting cube, a rectifier chip, and a micro-scale custom-designed light-emitting-diode (LED), and envisioned to be used for freely moving animal study. The proposed rectifier chip with a silicon area of 300μm×300μm is implemented in standard TSMC 0.18μm CMOS technology, for interfacing the piezoelectric cube and the microLED. Experimental results show that the proposed microsystem produces an available electrical power of 2.2 mW while loaded by amicroLED, out of an acoustic intensity of 7.2mW/mm2 using a 1mm3 crystal as the receiver. The whole system including the tested rectifier chip, a piezoelectric cube with the dimensions of , and a LED of 300μm×130μm have been integrated on a 3mm×1.5mm glass substrate, encapsulated inside a bio-compatible PDMS layer and tested successfully for final prototyping. The total volume of the fully-packaged device is estimated around 2.85mm3.

中文翻译：

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用于光遗传学的超声驱动紧凑型可植入粉尘。

本文提出了一种用于深部组织光遗传学刺激的超声微系统。解释了原型开发的所有阶段，从建模用于能量收集，设计，仿真和测量芯片的压电晶体开始，最后以模拟设置测试整个系统。该开发的系统由压电采集立方体，整流器芯片和微型定制设计的发光二极管（LED）组成，并有望用于自由移动的动物研究。所建议的硅芯片面积为300μm×300μm的整流器芯片是采用标准的TSMC0.18μmCMOS技术实现的，用于连接压电立方体和microLED。实验结果表明，所提出的微系统在由amicroLED加载时产生的可用电能为2.2 mW，使用1mm3晶体作为接收器的7.2mW / mm2的声强。整个系统包括经过测试的整流器芯片，尺寸为的压电立方体和300μm×130μm的LED，已集成在3mm×1.5mm的玻璃基板上，并封装在生物相容的PDMS层中，并成功测试了最终原型。完全封装的设备的总体积估计约为2.85mm3。