Microgears are the crucial parts in the manufacturing of complex microdevices for motion control requiring ultra-light weight, tiny and compact, operational characteristics and dimensional accuracy. During the microforming of gears, the material behavior and grain size effect influence on the formability, yield strength, microhardness and surface roughness of the microgear. In this work, the combined effect of grain size and temperature on flow stress and microstructure of the microgear is investigated during the microplastic deformation of 6063 aluminum alloy. The material with three different grain sizes of aluminum 6063 alloy is considered for its good formability and its strength. The results show the grain size, orientation and boundary have a significant effect on the microplastic deformation process. Microhardness values at the middle and at tooth are controversy and exhibit the inhomogeneous deformation due to the occurrences of the size effect. The grain size dependence on temperature is determined with their difference in microstructure and mechanical properties. This research outcomes thus contribute the basic considerate about the hot microextrusion of aluminum 6063 alloy and enable the development of microgears.

微齿轮是用于运动控制的复杂微设备制造中的关键部件，这些设备需要超轻的重量，纤巧而紧凑的操作特性和尺寸精度。在齿轮的微成形过程中，材料性能和晶粒尺寸效应会影响微齿轮的可成形性，屈服强度，显微硬度和表面粗糙度。在这项工作中，研究了6063铝合金在微塑性变形过程中晶粒尺寸和温度对微齿轮流动应力和微观结构的综合影响。考虑具有三种不同粒径的铝6063合金的材料具有良好的可成型性和强度。结果表明，晶粒尺寸，取向和边界对微塑性变形过程具有重要影响。由于尺寸效应的出现，中部和牙齿的显微硬度值存在争议，并显示出不均匀的变形。晶粒尺寸对温度的依赖性取决于它们在微观结构和机械性能上的差异。因此，这项研究成果为铝6063合金的热微挤压提供了基本的考虑，并促进了微齿轮的发展。