Abstract In this study, AISI52100 steel surfaces were coated with bilayer Cr–N/TiB2 thin films in total thickness of 65 and 120 nm by magnetron sputtering. The CrN/TiB2 thin-films deposited under 10 and 20 sccm N2 flow whereas no N2 flow was used for a Cr/TiB2 thin film. The friction and wear behaviors of these bilayer thin-films consisting of metallic (Cr)/ceramic (TiB2) and ceramic(CrN)/ceramic(TiB2) layers were investigated via the tribometer tests under unlubricated and lubricated conditions. Bilayer thin-films were characterized by nanoindentation, microscopic and spectroscopic analysis. Results showed that N2 flow has significant effects on mechanical characteristics of bilayer coatings. Furthermore, the Cr/TiB2 thin film with a high porosity showed good tribological performance under 2 GPa contact pressure whereas the CrN/TiB2 thin film deposited at high N2 flow with high thickness and hardness showed the best tribological behavior.

中文翻译：

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磁控溅射双层Cr-N/TiB2薄膜涂层的摩擦磨损增强

摘要 在这项研究中，AISI52100 钢表面通过磁控溅射涂覆了双层 Cr-N/TiB2 薄膜，总厚度为 65 和 120 nm。CrN/TiB2 薄膜在 10 和 20 sccm N2 流量下沉积，而没有 N2 流量用于 Cr/TiB2 薄膜。这些由金属 (Cr)/陶瓷 (TiB2) 和陶瓷 (CrN)/陶瓷 (TiB2) 层组成的双层薄膜的摩擦和磨损行为通过摩擦计测试在未润滑和润滑条件下进行了研究。双层薄膜的特点是纳米压痕、显微和光谱分析。结果表明，N2 流量对双层涂层的机械特性有显着影响。此外，