Micro-cantilever has shown wide application prospect in the field of micro-sensors, actuators, gyroscope, and so on. There are abundant research studies on simple cantilever beam models, but there are few on S-shaped folding cantilever with complex structure, although it is widely used. In order to study the deformation failure of S-shaped folding cantilever, the force analysis of S-shaped folding cantilever was carried out in this article, and the stress values of different positions under the external load of the cantilever were deduced. The finite element model about S-shaped folding cantilever was built based on software ANSYS. The theoretical calculation was compared with the finite element calculation, and the results showed that the max stress is 681 MPa based on the derived theoretical formula, the max stress is 673 MPa based on the ANSYS, the error is 1.18%, which can prove formula is accurate. To further validate the stress predicted by the mathematical modeling, a micro-force testing platform was built to test the cantilever. Since the stress value cannot be measured directly in the test, the force corresponding to the stress was taken as standard and compared it with the simulation. The tested external force was corresponding the yield limit. The results showed that the experimental force was 0.06462 N before the plastic deformation occurred, the theoretical outcome was 0.065231 N corresponding the yield limit, the error was 0.94%. Both simulation and experimental results depict that the theoretical model is effective for predicting the stress of the S-shaped folded cantilever. The theoretical model helps to enhance the efficiency, and improve the performance, predictability, and control of the S-shaped folding cantilever.

微悬臂梁在微传感器，致动器，陀螺仪等领域具有广阔的应用前景。关于简单悬臂梁模型的研究很多，但结构复杂的S形折叠悬臂梁虽然使用广泛，但研究很少。为了研究S形折叠悬臂的变形破坏，本文对S形折叠悬臂进行了力分析，推导了悬臂在外力作用下不同位置的应力值。基于ANSYS软件建立了S形折叠悬臂的有限元模型。将理论计算与有限元计算进行了比较，结果表明，根据推导的理论公式，最大应力为681 MPa，基于ANSYS的最大应力为673 MPa，误差为1.18％，可以证明公式是正确的。为了进一步验证数学模型预测的应力，建立了一个微力测试平台来测试悬臂。由于不能在测试中直接测量应力值，因此将对应于应力的力作为标准，并将其与模拟进行比较。测试的外力对应于屈服极限。结果表明，塑性变形发生前的试验力为0.06462 N，对应屈服极限的理论结果为0.065231 N，误差为0.94％。仿真和实验结果均表明，该理论模型可有效预测S形折叠悬臂的应力。理论模型有助于提高效率，并改善性能，可预测性，