Micro rotary structures have attracted increasing attention in many industrial applications. However, the fabrication of complex micro rotary structures with high strength, high hardness, and low rigidity, poses a significant challenge to traditional machining methods. To solve this difficult problem, this study proposes a novel method of fabricating complex micro rotary structures by using wire electrochemical grinding (WECG), which is an anodic dissolution process and has no machining force. WECG, a type of ECM, has some major advantages over wire electrical discharge grinding (WEDG): no electrode wear, absence of residual stress, good surface quality, low machining cost, and high machining efficiency. Firstly, this study investigated the influences of the process parameters on the dimensional accuracy of the micro grooves produced, then optimized these process parameters. A qualitative simulation of WECG was conducted to reveal the reason for the trumpet-like micro grooves fabricated by WECG. Finally, based on the optimal process parameters, several different kinds of rotary structures were successfully produced by WECG. The experimental results demonstrate that WECG is a promising method for fabricating complex rotary structures of difficult-to-cut materials at low cost and with high efficiency.

微型旋转结构在许多工业应用中已引起越来越多的关注。然而，具有高强度，高硬度和低刚度的复杂微旋转结构的制造对传统的加工方法提出了重大挑战。为了解决这个难题，本研究提出了一种新的利用线材电化学研磨（WECG）制备复杂的微旋转结构的方法，该方法是一种阳极溶解工艺，并且没有机械加工力。WECG是一种ECM，它比电火花线切割研磨（WEDG）具有一些主要优点：无电极磨损，无残余应力，表面质量好，加工成本低，加工效率高。首先，本研究调查了工艺参数对生产的微沟槽尺寸精度的影响，然后优化这些过程参数。对WECG进行了定性模拟，揭示了WECG制造的喇叭状微槽的原因。最后，基于最佳工艺参数，WECG成功生产了几种不同类型的旋转结构。实验结果表明，WECG是一种低成本，高效率地制造难切削材料的复杂旋转结构的有前途的方法。