Dynamically-tunable impedance matching is a key feature in numerous radio-frequency (RF) applications at high frequencies (10 s of MHz) and power levels (100s–1000 s of Watts and above). This work develops techniques that enable the design of high power tunable matching networks (TMN) that can be tuned orders of magnitude faster than with conventional tunable impedance matching techniques, while realizing the high power levels required for many industrial applications. This is achieved by leveraging an emerging technique – known as phase-switched impedance modulation (PSIM), which involves switching passive elements at the rf operating frequency – that has previously been demonstrated at rf frequencies at up to a few hundred Watts. In this paper, we develop design approaches that enable it to be practically used at up to many kilowatts of power at frequencies in the 10 s of MHz. A detailed analysis of the factors affecting the losses as well as the tradeoffs of a basic PSIM-based element is provided. Furthermore, it is shown how incorporating additional stages to the PSIM-based element, including impedance scaling and / or the addition of series or shunt passive elements, influences the losses and enables the efficient processing of high power levels given the limitations of available switches. A PSIM-based TMN that matches load impedances to 50 $\,\Omega$ and delivers up to 1.5 kW of power at frequencies centered around 13.56 MHz is implemented and tested over a load impedance range suitable for various industrial plasma processes.

中文翻译：

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基于相控阻抗调制的1.5 kW射频可调匹配网络

动态可调阻抗匹配是在高频（10 s MHz）和功率水平（100s–1000 s瓦特及以上）的众多射频（RF）应用中的关键功能。这项工作开发出的技术使大功率可调谐匹配网络（TMN）的设计比传统可调谐阻抗匹配技术的调谐速度快了几个数量级，同时实现了许多工业应用所需的高功率水平。这是通过利用一种新兴技术来实现的，该技术称为相控阻抗调制（PSIM），该技术涉及以rf工作频率切换无源元件-先前已在rf频率下证明了高达数百瓦的功率。在本文中，我们开发了一些设计方法，使其能够在10 s MHz的频率下以高达数千瓦的功率实际使用。提供了对影响损耗以及基于PSIM的基本元素的权衡因素的详细分析。此外，还显示了如何在基于PSIM的元件中增加附加级（包括阻抗缩放和/或增加串联或并联无源元件）如何影响损耗，并在可用开关受限的情况下实现高功率电平的高效处理。基于PSIM的TMN，负载阻抗匹配至50 包括阻抗缩放和/或增加串联或并联无源元件，会影响损耗，并在可用开关有限的情况下，能够高效处理高功率电平。基于PSIM的TMN，负载阻抗匹配至50 包括阻抗缩放和/或增加串联或并联无源元件，会影响损耗，并在可用开关有限的情况下，能够高效处理高功率电平。基于PSIM的TMN，负载阻抗匹配至50 $ \，\ Omega $ 并在适用于各种工业等离子工艺的负载阻抗范围内实现并测试了以中心频率13.56 MHz为中心的最高1.5 kW功率。