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Toward a Compact Wireless Surface Acoustic Wave Pirani Microsensor with Extended Range and Sensitivity
Heat Transfer Engineering ( IF 2.3 ) Pub Date : 2020-02-04 , DOI: 10.1080/01457632.2019.1707409 Sofia Toto 1 , Pascal Nicolay 2 , Gian Luca Morini 3 , Achim Voigt 1 , Jan G. Korvink 1 , Juergen J. Brandner 1
Heat Transfer Engineering ( IF 2.3 ) Pub Date : 2020-02-04 , DOI: 10.1080/01457632.2019.1707409 Sofia Toto 1 , Pascal Nicolay 2 , Gian Luca Morini 3 , Achim Voigt 1 , Jan G. Korvink 1 , Juergen J. Brandner 1
Affiliation
A wireless vacuum sensor based on the Pirani principle and Surface Acoustic Waves (SAW) has been designed, simulated and manufactured. The sensing unit is a heat conductivity gauge based on a passi...
中文翻译:
实现具有扩展范围和灵敏度的紧凑型无线表面声波皮拉尼微传感器
基于皮拉尼原理和表面声波 (SAW) 的无线真空传感器已被设计、模拟和制造。传感单元是一种基于被动式热导率计...
更新日期:2020-02-04
中文翻译:
实现具有扩展范围和灵敏度的紧凑型无线表面声波皮拉尼微传感器
基于皮拉尼原理和表面声波 (SAW) 的无线真空传感器已被设计、模拟和制造。传感单元是一种基于被动式热导率计...